Design of very small electromagnetic and electrostatic micro motors

The paper describes a general design tool that can be used for small and ex tra small electric and magnetic devices. Such devices generate micro motion s. Due to their dimensions and specially due to the short axial length comp ared to the radial dimensions a three dimensional analysis of the field is required. Complex geometries recommend a well tuned engineering tool to gua rantee reliable results. Here, a standard three dimensional finite element approach is chosen to compute the electric and magnetic field quantities re spectively. In combination with a user-friendly Computer interface, control ling the necessary finite element procedures, a powerful engineering tool w ith a general application range is obtained. For that reason it was possibl e to apply numerical optimization algorithms to realize a fully automated d esign tool. Various configurations are studied using the same software tool s. The paper aims on the application of the finite element method (FEM).