Twenty-four micro-solar cells connected in series have been fabricated on s
emi-insulating (SI) GaAs substrates for application in the fields of micro-
electromechanical systems. The array was formed in an area of 0.8 x 1.0 mm(
2), and exhibited an open-circuit voltage of 22.5 V under illumination of 5
mW at the wavelength of 815 nm. Calculation and experiment has demonstrate
d that, unlike conventional solar cells, the shunt resistance deteriorates
the output characteristics far more seriously than the series resistance in
the case of micro-solar cells. Leakage currents in both the unit diode and
the substrate were evaluated separately. A quantitative estimate based on
the measurements revealed that photocurrents generated in the surface of th
e SI substrate could function as a vital shunt resistance. Light-blocking m
etal films were successfully employed to obtain high output voltage.