Jc. Nie et al., Regulated epitaxy of YBa2Cu3O7-delta by atomic control of step arrays on vicinal SrTiO3(100) substrates, JPN J A P 2, 38(12B), 1999, pp. L1499-L1501
We have investigated the surface morphologies of vicinal SrTiO3 substrates
and YBa2Cu3O7-delta (YBCO) thin films by atomic force microscopy (AFM). Ext
remely regular step arrays had been successfully developed vicinal SrTiO3 w
ith 5.7 degrees misorientation. AFM reveals a great improvement of the surf
ace microstructures of YBCO thin films grown on such terraced vicinal subst
rates, exhibiting a regular step-flow growth mode and almost precipitate fr
ee surfaces of practical device sizes. By a high growth rate and low growth
temperature, the step bunching and therefore the total roughness have been
substantially suppressed.