The sputtering of TiNi polycrystalline alloys without and with a titanium m
esh has been investigated for the development of shape memory alloy (SMA) m
icro-actuators. The thickness and composition distributions of TiNi thin fi
lms have been determined by Rutherford backscattering spectroscopy (RBS). T
he composition of sputtered films was demonstrated to depend on the density
of the titanium mesh and the distance from the target center, thus enablin
g easy fabrication of high and low temperature SMA actuators. The transitio
n temperatures and resistivity have been measured with respect to the compo
sition.