Ultrathin DLC and SiOx layer deposition on poly(ethylene terephthalate) and restriction of surface dynamics

The hydrophilicity of oxygen plasma-reated polymer surfaces decays with sto ring time in air environments. Because they are dense, highly crosslinked, and chemically stable, diamond-like carbon (DLC) films and silicon oxide fi lms (SiOx) were deposited on poly(ethylene terephthalate) by plasma-enhance d chemical vapor deposition to restrict polymer surface dynamics. In this s tudy, the effects of ultrathin films on surface dynamics of these polymers were investigated. Time layers were deposited on substrates with thickness below 100 Angstrom. The thickness of films was measured with a scanning ana lyzer ellipsometer, while ATR-IR spectroscopy and Raman spectroscopy were p erformed to observe the chemical structure of the films. Films below 50 Ang strom were also shown to be effective in stabilizing the plasma treated pol ymer surfaces. (C) 2000 John Wiley & Sons, Inc.