Phase modifications in polysilicon films with fibrous and dendritic structure

X-ray and electron diffraction have been used to study structure modificati ons in polysilicon films produced by low-pressure chemical vapour depositio n. It was shown that additional diffraction reflections are observed in pol ysilicon films with fibrous and dendritic structure. These additional refle ctions may be considered as relative to close-packed hexagonal structure wi th the following lattice parameters: a = 3.808 Angstrom, b = 6.186 Angstrom . The orientation relationship between the cubic diamond and hexagonal phas es is [1 1 1](cub) parallel to [0 0 1] and ((1) over bar 1 0)(cub)* paralle l to (1 0 0)*. The suggested hexagonal structure formation mechanism is bas ed upon the existence of planar faults in {1 1 1} planes. (C) 2000 Publishe d by Elsevier Science B.V. All rights reserved.