A new data reduction method is presented for single-wavelength ellipsometry
. A genetic algorithm is applied to ellipsometric data to find the best fit
. The sample consists of a single absorbing layer on a semi-infinite substr
ate. The genetic algorithm has good convergence and is applicable to many d
ifferent problems, including those with different independent measurements
and situations with more than two angles of incidence. Results are similar
to those obtained by other inversion techniques. (C) 2000 Optical Society o
f America [S0740-3232(00)02201-8].