Genetic algorithm for ellipsometric data inversion of absorbing layers

Authors
Cormier, G Boudreau, R
Citation
G. Cormier et R. Boudreau, Genetic algorithm for ellipsometric data inversion of absorbing layers, J OPT SOC A, 17(1), 2000, pp. 129-134
Citations number
15
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Optics & Acoustics
Journal title
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION
ISSN journal
10847529 → ACNP
Volume
17
Issue
1
Year of publication
2000
Pages
129 - 134
Database
ISI
SICI code
1084-7529(200001)17:1<129:GAFEDI>2.0.ZU;2-1
Abstract
A new data reduction method is presented for single-wavelength ellipsometry . A genetic algorithm is applied to ellipsometric data to find the best fit . The sample consists of a single absorbing layer on a semi-infinite substr ate. The genetic algorithm has good convergence and is applicable to many d ifferent problems, including those with different independent measurements and situations with more than two angles of incidence. Results are similar to those obtained by other inversion techniques. (C) 2000 Optical Society o f America [S0740-3232(00)02201-8].