Structural and optical properties of CVD thin tungsten oxide films

Authors
Gogova, D Gesheva, K Szekeres, A Sendova-Vassileva, M
Citation
D. Gogova et al., Structural and optical properties of CVD thin tungsten oxide films, PHYS ST S-A, 176(2), 1999, pp. 969-984
Citations number
32
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH
ISSN journal
00318965 → ACNP
Volume
176
Issue
2
Year of publication
1999
Pages
969 - 984
Database
ISI
SICI code
0031-8965(199912)176:2<969:SAOPOC>2.0.ZU;2-Z
Abstract
Thin amorphous and polycrystalline tungsten oxide films were prepared by ch emical vapour deposition at atmospheric pressure from a metalorganic precur sor - tungsten hexacarbonyl. The dependence of the structural and optical p roperties of tungsten oxide films on the technological conditions has been investigated by XRD, Raman spectroscopy and spectroscopic ellipsometry.