Ion-molecule reactions and ion energies in a CF4 discharge

Absolute cross sections have been measured for reactants typically found in carbon tetrafluoride (CF4) discharges for collision energies below a few h undred electron volts. The reactions investigated include collision-induced dissociation and dissociative electron transfer reactions for CF3+ and Fcolliding with CF4, and collisional electron detachment for F- colliding wi th CF4. Also presented are measurements of energies and relative intensitie s of ions generated in de Townsend CF4 discharges with E/N values ranging f rom 4 x 10(-18) V m(2) to 25 x 10(-18) V m(2) [4 to 25 kTd]. Ion energy and ion intensity data for the Townsend discharges are analyzed in light of th e measured cross sections. [S1063-651X(99)05212-5].