Preparation and characterization of Pd-Ag alloy composite membrane with magnetron sputtering

A Pd-Ag (24 wt%) alloy composite membrane was prepared by the magnetron spu ttering. A gamma-Al2O3 membrane was synthesized by the sol-gel method and u sed as substrate of the Pd-Ag alloy film. The process parameters of the mag netron sputtering were optimized as a function of the compactness of the Pd -Ag alloy film. The best membrane with a thickness of 1 mu m was produced w ith a sputtering pressure of 2.7 Pa and a substrate temperature of 400 degr ees C. The membrane had an H-2/N-2 permselectivity of 51.5-1000 and an H-2 permeation rate of 0.036-1.17 x 10(-5)cm(3)/cm(2).s. Pa, depending on opera ting conditions.