Preparation and properties of transparent conducting zinc oxide and aluminium-doped zinc oxide films prepared by evaporating method

Authors
Ma, J Ji, F Ma, HL Li, SY
Citation
J. Ma et al., Preparation and properties of transparent conducting zinc oxide and aluminium-doped zinc oxide films prepared by evaporating method, SOL EN MAT, 60(4), 2000, pp. 341-348
Citations number
15
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
SOLAR ENERGY MATERIALS AND SOLAR CELLS
ISSN journal
09270248 → ACNP
Volume
60
Issue
4
Year of publication
2000
Pages
341 - 348
Database
ISI
SICI code
0927-0248(20000201)60:4<341:PAPOTC>2.0.ZU;2-N
Abstract
Undoped and aluminium-doped zinc oxide films have been prepared by thermal evaporation of zinc acetate [Zn(CH3COO)(2) 2H(2)O] and aluminium chloride [ AlCl3] onto a heated glass substrate. The structural and optoelectrical pro perties of the films have been studied. The effects of heat treatment for t he as-deposited films in air and vaccum are investigated. Highly transparen t films with conductivity as low as 2 x 10(-3) Omega cm can be produced by controlling the deposition parameters. The electron carrier densities are i n the range 0.2-7 x 10(19) cm(-3) with mobilities of 22-58 cm(2) V-1 s(-1). (C) 2000 Elsevier Science B.V. All rights reserved.