The growth of alloy layers by molecular-beam deposition is considered theor
etically, with emphasis on the connection between local variations in the c
omposition and surface roughening. For alloy layers mismatched to the subst
rate, the elastic fields generated by the mismatch couple with the elastic
fields generated by compositional inhomogeneities, leading to a joint compo
sitional/morphological instability under certain growth conditions. We show
that the non-equilibrium nature of the growth leads to a competition betwe
en these strain relieving mechanisms, the alloy thermodynamics and the kine
tics of the deposition process. We show explicitly how our theory is applie
d to real systems, taking InGaAs layers as an example. The theory is genera
lized to include the formation of atomically ordered phases during growth,
by focusing on the experimentally observed relation between ordering and lo
cal surface misorientations. (C) 1999 Elsevier Science S.A. All rights rese
rved.