Jw. Choi et al., Thin crystalline functional group copolymer poly(vinylidene fluoride-trifluoroethylene) film patterning using synchrotron radiation, APPL PHYS L, 76(3), 2000, pp. 381-383
The photodegradation mechanism due to synchrotron radiation exposure of cry
stalline poly[vinylidene fluoride-trifluoroetylene, P(VDF-TrFE)] copolymer
thin films has been studied with ultraviolet photoemission spectroscopy (UP
S) and mass spectroscopy. Upon increasing exposure to x-ray white light (h
nu less than or equal to 1000 eV), UPS measurements reveal that substantial
chemical modifications occur in P(VDF-TrFE) 5 monolayer films, including t
he emergence of new valence band features near the Fermi level, indicating
a semimetallic photodegradeted product. The photodetached fragments of the
copolymer consist mainly of H-2, HF, CHF, CH2. This x-ray exposure study de
monstrates that P(VDF-TrFE) films, possessing unique technologically import
ant properties, can be directly patterned by x-ray lithographic processes.
(C) 2000 American Institute of Physics. [S0003-6951(00)00703-8].