A classical Monte Carlo (MC) device simulation has been modified to locally
introduce the effects of electron degeneracy and nonequilibrium screening.
Its validity in the case of AlInAs/GaInAs HEMT's has been checked through
the comparison, first, with a quantum Schrodinger-Poisson (SP) simulation i
n the case of a complicated layer structure, which is actually used in the
fabrication of real devices, and second, with experimental results of stati
c characteristics of recessed delta-doped HEMT's.