A gas pressure sensor based on ZrO2 thin films for use at high temperatures

Authors
Khan, MA Gondal, MA Khawaja, EE
Citation
Ma. Khan et al., A gas pressure sensor based on ZrO2 thin films for use at high temperatures, INT J ELECT, 87(2), 2000, pp. 227-234
Citations number
21
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
INTERNATIONAL JOURNAL OF ELECTRONICS
ISSN journal
00207217 → ACNP
Volume
87
Issue
2
Year of publication
2000
Pages
227 - 234
Database
ISI
SICI code
0020-7217(200002)87:2<227:AGPSBO>2.0.ZU;2-K
Abstract
A gas pressure sensing device based on ZrO2 thin films for use at high temp eratures is presented. The films were deposited on glass substrates through electron beam evaporation of ZrO2 tablets in vacuum with residual oxygen p ressure of the order of 10(-4) mbar. The piezoresistive characteristics of the device for different pressures of N-2, CO2, Ar and He at different temp eratures were investigated. The experimental results and the underlying phy sical mechanisms are discussed.