A high degree of in-depth compositional uniformity is an important prerequi
site for obtaining device-quality CuInSe2 absorber films. In general, it is
reported that two-stage growth processes lack reproducibility due to mater
ial losses during the high-temperature selenization stages. In this study,
absorber films were prepared by a typical two-stage process in which seleni
um-free (In/Cu/In) and selenium-containing (InSe/Cu/InSe) precursors were r
eacted with H2Se/Ar. Scanning electron microscopy (SEM) studies revealed a
significant improvement in the morphological properties of the absorber fil
ms in the latter case. X-ray fluorescence (XRF) K-alpha 1,K-2 line intensit
y measurements of the samples indicated no loss of In or any other element
during the selenization stages, irrespective of the precursor alloy conside
red. The in-depth compositional uniformity of the samples was determined by
measuring the XRF K-alpha 1,K-2 line intensities of successively etched sa
mples. For samples obtained from the selenium-free precursors, this in-dept
h analysis revealed a pronounced separation of the elements: non-uniform Se
interdiffusion and a sharp increase in the In concentration towards the Mo
back contact. In samples prepared from selenium-containing precursors, the
concentration of all three elements remained virtually unchanged as a func
tion of the sample thickness. X-ray diffraction (XRD) studies also revealed
a single-phase material with a very strong preferred [112] orientation.