Internal stresses in multilayer coatings from Ag-Sb and Pt-Co alloys with d
ifferent alloying element contents in the individual sublayers are measured
during the process of deposition. The results are compared with the stress
es in thick alloy coatings of a content corresponding to the content of the
individual sublayers in the multilayer system. Stresses in the first subla
yers of a multilayer Ag-Sb coating correspond to those in a one-layer thick
coating. Stresses in the subsequent sublayers are changed under the influe
nce of previous sublayers. Changes in the internal stresses are related to
the change in the element and phase content of the coatings. Strong relaxat
ion effects are detected in multilayer alloy Pt-Co coatings, caused by the
desorption of the codeposited hydrogen and the layer cracking.