M. Igeta et al., Thermal expansion and temperature measurement in a microscopic scale by using the Atomic Force Microscope, JSME I J B, 42(4), 1999, pp. 723-730
Citations number
16
Categorie Soggetti
Mechanical Engineering
Journal title
JSME INTERNATIONAL JOURNAL SERIES B-FLUIDS AND THERMAL ENGINEERING
An experimental study on microscopic scale measurements of thermal expansio
n and temperature by using the Scanning Joule Expansion Microscope (SJEM) b
ased on the Atomic Force Microscope (AFM) was conducted.. While the AFM is
scanning on the sample heated by AC current, topographical and thermal expa
nsion images are measured simultaneously by detecting DC and AC motions of
the cantilever. In order to apply this technique to the temperature measure
ment in microscopic scale, the sample was covered with a thin film of polym
er (PMMA) which has a high thermal expansion coefficient compared with meta
ls and dielectric materials. Merits of this technique are (1) quite simplic
ity of measurement because of using the commercial cantilever instead of co
mplicated thermal cantilever for the typical Scanning Thermal Microscopy (S
ThM) and (2) a higher spatial resolution of 20 nm which is restricted by th
e point contact scale between the cantilever and the sample.