Absolute three-dimensional shape measurements using coaxial and coimage plane optical systems and Fourier fringe analysis for focus detection

Authors
Takeda, M Aoki, T Miyamoto, Y Tanaka, H Gu, RW Zhang, ZB
Citation
M. Takeda et al., Absolute three-dimensional shape measurements using coaxial and coimage plane optical systems and Fourier fringe analysis for focus detection, OPT ENG, 39(1), 2000, pp. 61-68
Citations number
18
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Optics & Acoustics
Journal title
OPTICAL ENGINEERING
ISSN journal
00913286 → ACNP
Volume
39
Issue
1
Year of publication
2000
Pages
61 - 68
Database
ISI
SICI code
0091-3286(200001)39:1<61:ATSMUC>2.0.ZU;2-H
Abstract
For the absolute and shade-free shape measurement of 3-D objects with large height discontinuities, a coaxial optical sensor system with a common imag e plane for pattern projection and observation is proposed. Experimental re sults are presented that demonstrate the shape measurements of objects with a deep hole and large discontinuities. (C) 2000 Society of Photo-Optical i nstrumentation Engineers. [S0091-3286(00)00701-7].