X-ray fluorescence study of organic-inorganic polymer conversion into ceramics induced by ion irradiation

Changes to the local and electronic structures of phenyltriethoxysilane (PT ES) films when irradiated at room temperature with gold ion concentrations of 5 x 10(14) to 2.5 x 10(15) cm(-2) and with carbon ion concentrations of 5 x 10(15) cm(-2) were studied using x-ray emission and photoelectron spect roscopies. The fluorescent ultrasoft silicon L-II,L-III and carbon K alpha x-ray emission spectra of unirradiated and irradiated PTES films were measu red at the Advanced Light Source,and the Center for Advanced Microstructure s and Devices. It is found that the PTES polymers that are exposed to ion d oses higher than 5 x 10(14) cm(-2) convert to Si:O:C ceramics. Annealing th e irradiated PTES polymer films at 1000 degrees C segregates the carbon ato ms into sp(2)-like clusters. [S0163-1829(99)00546-9].