ULTRASONIC MULTILAYER METAL-FILM METROLOGY

Authors
MORATH CJ COLLINS GJ WOLF RG STONER RJ
Citation
Cj. Morath et al., ULTRASONIC MULTILAYER METAL-FILM METROLOGY, Solid state technology, 40(6), 1997, pp. 85
Citations number
7
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter
Journal title
Solid state technology → ACNP
ISSN journal
0038111X
Volume
40
Issue
6
Year of publication
1997
Database
ISI
SICI code
0038-111X(1997)40:6<85:UMMM>2.0.ZU;2-V