Deposition, microstructure and mechanical and tribological properties of magnetron sputtered TiN/TiAlN multilayers

By using unbalanced magnetron sputtering, TiN/TiAIN multilayers with bilaye r lengths from 10 nm to 30 nm and thickness of 3 mu m were deposited on ste el substrates. The multilayer microstructure was characterized by X-ray dif fraction, transmission electron microscopy, scanning electron microscopy; a nd the chemical composition by Rutherford backscattering and elastic recoil detection analysis. The mechanical properties were investigated by nanoind entation and stress measurements, where the radius of curvature of the subs trate was measured. Tribological properties were obtained by pin-on-disc me asurements. Similar hardness values were observed for the multilayers and t he single-layer coatings, while large improvements of the wear properties w ere observed for the multilayers compared to the single-layer coatings. Thi s was connected to a change in wear mechanism, the adhesive wear being sign ificantly reduced in the multilayers. (C) 2000 Published by Elsevier Scienc e S.A. All rights reserved.