Microsystems metrology

Authors
Hasche, K Wilkening, G
Citation
K. Hasche et G. Wilkening, Microsystems metrology, TEC MES, 66(12), 1999, pp. 475-475
Categorie Soggetti
Instrumentation & Measurement
Journal title
TECHNISCHES MESSEN
ISSN journal
01718096 → ACNP
Volume
66
Issue
12
Year of publication
1999
Pages
475 - 475
Database
ISI
SICI code
0171-8096(199912)66:12<475:MM>2.0.ZU;2-T