Development of a 3D-laserinterferometric nano-measuring-system for Abbe-error-free fitting into scanning force microscopes

In the scanning probe microscopy metrological questions regarding the quant itative geometric determination of test objects are gathering importance. L aser interferometry is a highly accurate length measurement technique and t raceable to the metre definition. Three-dimensional length measurements are carried out within the Cartesian coordinate system, and orthogonality can be particularly well produced and controlled with plane mirrors. A plane mi rror interferometer with its measuring beams orthogonally fixed onto the pl ane mirror is used. The 3D nano-measuring-system is set up with the orthogo nal plane mirrors and the measuring beams of the (x,y,z)-interferometer. Fo r the extremely accurate measurement of dimensional structures two concepts for universally applicable 3D nano-measuring-systems are developed, and th eir advantages and disadvantages are discussed. An interferometric 3D nano- measuring-system in fixed Cartesian coordinates and free of Abbe errors is particularly efficient.