Measurement of indenters with a scanning force microscope

The paper deals with the determination of the geometry of microhardness ind enters with a calibrated scanning force microscope. The accuracy the geomet ry of the indenter is characterized with determines the accuracy of indenta tion measurements, especially in the micro- and nano-range. The scanning fo rce microscope is calibrated with fitted laser interferometers free of Abbe errors, The methods of measurement and of evaluation for determining the g eometry of the indenters are presented. The geometrical deviations of the i ndenter are summarized in an area function which is compared with an area f unction determined with the help of a reference sample.