Nanoscale compositional analysis of Fe/Tb multilayers: A field ion microscopy and tomographic atom probe study

Sputtered Fe/Tb multilayered systems have been successfully deposited on ne edle-shaped substrates. These specimens have been observed by field ion mic roscopy and the layered sequence is evidenced together with the preferentia l field evaporation of terbium versus iron. The first direct atomic scale c oncentration data of Fe/Tb multilayers by means of the tomographic atom pro be are given. The three-dimensional reconstructions of the layers were obta ined and the compositional modulation was observed across the specimens. (C ) 2000 American Institute of Physics. [S0021-8979(00)05402-5].