BOMBARDMENT-INDUCED LIGHT-EMISSION FROM A SI(100) TARGET

Authors
GHOSE D BRINKMANN U HIPPLER R
Citation
D. Ghose et al., BOMBARDMENT-INDUCED LIGHT-EMISSION FROM A SI(100) TARGET, Physical review. B, Condensed matter, 55(20), 1997, pp. 13989-13992
Citations number
22
Categorie Soggetti
Physics, Condensed Matter
Journal title
Physical review. B, Condensed matter → ACNP
ISSN journal
01631829
Volume
55
Issue
20
Year of publication
1997
Pages
13989 - 13992
Database
ISI
SICI code
0163-1829(1997)55:20<13989:BLFAST>2.0.ZU;2-1
Abstract
The optical line emission from excited Si atoms following SF5+ and Ne ion bombardment of a Si(100) surface was studied. Transients in the p hoton yield due to oxygen pressure variation have been observed. The r esults show evidence of nonlinear sputtering of adsorbed oxygen atoms due to the impact of polyatomic ions.