MICROMACHINED VARACTOR WITH WIDE TUNING RANGE

Authors
DEC A SUYAMA K
Citation
A. Dec et K. Suyama, MICROMACHINED VARACTOR WITH WIDE TUNING RANGE, Electronics Letters, 33(11), 1997, pp. 922-924
Citations number
6
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Electronics Letters → ACNP
ISSN journal
00135194
Volume
33
Issue
11
Year of publication
1997
Pages
922 - 924
Database
ISI
SICI code
0013-5194(1997)33:11<922:MVWWTR>2.0.ZU;2-5
Abstract
A micromachined variable capacitor that achieves a wide tuning range i s proposed. The device, which was fabricated in a polysilicon surface micromachining process, has a tuning range of 25% and a quality factor of 9.6 at 1 GHz when the capacitance is tuned to 4pF.