Cathodic plasma polymerization and treatment by anode magnetron torch. I. The influence of operating parameters on anode magnetron torch glow discharge

The anode magnetron torch (AMT), which is a physically confined magnetron p lasma system, was developed for large-scale applications. It was found that a uniform funnel-shaped negative glow is crucial to achieve uniform plasma treatment in the focused area; this can be attained by adjusting the dista nce between two electrodes. The relationship between the gap distance (the distance from the edge of the glass tube to the cathode surface) and CDST e 2 (the cathodic dark space thickness at the edge of the glass tube) is anot her important factor which affects whether materials removed by sputtering will redeposit on the substrate surface. The CDST shrinks not only with the increase of input power, applied voltage or current, but also with the inc rease of the magnetic field strength or system pressure. The CDST e1 (the C DST at the center of the focused area) will contract and the CDST e2 will e xpand with a decrease in the gap distance. The influence of the electrode d istance on the CDST is complicated, because it causes not only a change in magnetic field strength, but also a change in the distribution of the magne tic field strength near the cathode surface. (C) 2000 American Vacuum Socie ty. [S0734-2101(00)02101-1].