Measuring the electrical characteristics of thin polymeric films

Citation
M. Gladys et al., Measuring the electrical characteristics of thin polymeric films, J VAC SCI A, 18(1), 2000, pp. 257-260
Citations number
13
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
ISSN journal
07342101 → ACNP
Volume
18
Issue
1
Year of publication
2000
Pages
257 - 260
Database
ISI
SICI code
0734-2101(200001/02)18:1<257:MTECOT>2.0.ZU;2-H
Abstract
A new simple device for measuring the insulating properties of thin polymer films as a function of applied load has been designed, developed, and test ed. This new apparatus, which is based on a commercially available and inex pensive pressure sensor, is very sensitive to small changes in applied pres sure. The pressure sensitivity of the apparatus is better than +/-20 Pa ove r a nominal pressure range of 0-200 kPa. Experimental results of the insula ting properties of ultrathin propyltrimethoxysilane polymeric films adsorbe d onto iron oxide substrates are presented and illustrate the implementatio n of the new apparatus. (C) 2000 American Vacuum Society. [S0734-2101(oo)01 101-5].