Comparative study of a-C : H films for inertial confinement fusion prepared with various hydrocarbon precursors by radio frequency-plasma enhanced chemical vapor deposition

Using a radio frequency remote plasma deposition process, hydrogenated amor phous carbon thin films were prepared from a variety of hydrocarbon precurs ors. Monomers were aliphatic chains (butane, trans-2-butene), rings (ethylc yclohexane), or aromatics (styrene, ethylbenzene), mixed with hydrogen. The se films were elaborated in order to be used in inertial confinement fusion experiments with the future megajoule laser. Thickness and roughness were studied and optimized in relation of plasma parameters. Structural properti es were analyzed by Fourier transform infrared, Raman diffusion, and others . (C) 2000 American Vacuum Society. [S0734-2101(00)03701-5].