Cryogenic substrate cooling or substrate heating without vacuum feedthroughs

Authors
Smith, WF Stokes, BG Crawford, JF
Citation
Wf. Smith et al., Cryogenic substrate cooling or substrate heating without vacuum feedthroughs, J VAC SCI A, 18(1), 2000, pp. 290-292
Citations number
4
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
ISSN journal
07342101 → ACNP
Volume
18
Issue
1
Year of publication
2000
Pages
290 - 292
Database
ISI
SICI code
0734-2101(200001/02)18:1<290:CSCOSH>2.0.ZU;2-N