Dense, homogeneous, and complete self-assembled monolayers (SAMs) with epox
y surface groups were fabricated from epoxysilanes to serve as a template f
or chemical anchoring of polymer layers. A combination of scanning probe mi
croscopy, ellipsometry, XPS, X-ray reflectivity, and contact angle measurem
ents was used to study their morphology and surface properties. Self-assemb
ly of epoxysilane molecules resulted in the formation of homogeneous SAMs 0
.85 nm thick with the surface roughness 0.22 nm. Epoxysilane SAMs were tl t
ruly monomolecular films with a virtually normal molecular orientation of d
ensely packed molecules, which were firmly attached to the substrate. The f
ormation of stable polymer layers from carboxy-terminated polystyrenes on r
eactive SAM surfaces was demonstrated.