Dc. Schmidt et al., The evolution of interstitial-type defects in silicon during platinum diffusion from 400 to 600 degrees C following 2-MeV electron irradiation, MAT SCI E B, 68(2), 1999, pp. 67-71
Platinum has been diffused into epitaxial n-type silicon for 30 min at temp
eratures from 400 to 600 degrees C following room temperature irradiation w
ith 2-MeV electrons at a dose of 1 x 10(17) e(-) cm(-2). Platinum has only
been detected by deep level transient spectroscopy (DLTS) following the hig
hest diffusion temperature. For lower temperatures defects, not previously
reported. arise which are thought to be of interstitial nature. The two pri
ncipal defect levels are determined to be located at 0.29 and 0.41 eV below
the conduction band. The compensation for the two lowest diffusion tempera
tures is observed to be extremely strong as manifested by a strong reductio
n of the steady state reverse bias capacitance during the DLTS measurements
. Following thermal treatment at 500 degrees C this capacitance, however, i
ncreases. DLTS measurements down to 20 K detected thermal donors as well as
a number of other defects not previously reported. Their signatures have b
een determined by DLTS and TSCap (thermally stimulated capacitance) measure
ments. The nature of the observed defects is discussed with reference to re
cent results concerning interstitial defects. (C) 1999 Elsevier Science S.A
. All rights reserved.