Very thin TiO2 films have been prepared by sol-gel and deposited on a silve
r layer for Surface Plasmon Resonance (SPR) measurements. Densification of
the samples has been studied by determining from SPR measurements the optic
al index (ranging from 1.68 to 1.92) and thickness (ranging from 1.68 to 1.
92 nm) at each step of the annealing procedure. The structure of the layer
(amorphous and/or crystalline) has been checked at the final stage of the t
hermal treatment by High Resolution Transmission Electron Microscopy(HRTEM)
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