A normal mode theory of capacitive radio frequency discharges between parallel electrodes under diffusion and recombination gas-discharge regimes

A normal mode theory of standard capacitive rf discharges between parallel electrodes is achieved in terms of electron plasma wave resonances by solvi ng electrostatic fluid equations under so-called linear-diffusion and nonli near-recombination gas-discharge regimes for a wide gas-pressure range. The rf plasma is produced by the main resonance and also by another new and lo west resonance of the electron plasma wave. With a very thin plasma-thickne ss, the plasma is produced by this new lowest resonance. Even under an off- resonance condition, the plasma can be produced. Behavior of rf plasma unde r the recombination regime is quite different from that under the diffusion regime, for example, nonlinear low-density discharges and hysteresis pheno mena of up-/down-jumping with gas pressure. Thresholds of applied rf voltag e and gas pressure for maintaining the discharge are obtained within a firs t-order approximation. (C) 2000 American Institute of Physics. [S1070-664X( 00)02402-2].