Switching has been observed in a wide variety of materials and devices. Hyd
rogenated amorphous silicon has become one of the most important cases beca
use of interest in neural network applications. Although there are many rep
orts regarding this phenomenon, not all of the physical processes involved
are still determined precisely. Therefore, some more experimental informati
on is needed in order to achieve this task. Much of the behavior of the dev
ices has been ascribed to the existence of a filamentary region which is pr
oduced after the first switching process, called forming. We observed this
filamentary region in its full extension by producing forming in amorphous
silicon devices with coplanar metallic contacts placed near each other (sim
ilar to 5 mu m). The I-V characteristics, filament optical and atomic force
microscopy images and chemical etching led us to correlate changes in resi
stance to metal inclusion into the amorphous film. There are two stages: th
e first is related to contact stabilization, the second to metal transport
into the film bulk. Optical images show a permanent filamentary region afte
r forming. AFM images of these filaments showed that they are formed essent
ially by material accumulation between the contacts. This material tends to
get some atomic arrangement, becoming a polycrystalline solid. If the devi
ce was led to breakdown, such accumulation becomes either a hillock or a th
in conducting channel connecting both contacts. In the case of a switching
filament, the accumulation tends to be a chain of smaller hillocks along th
e conduction path. Metal from the contacts remains in the conduction path a
fter forming and chemical etching indicated that it is placed near the path
core. Before forming, a tunneling transport process can be ascribed to the
non-ohmic behavior of the samples during the first stage of metallic inclu
sion. (C) 2000 Elsevier Science Ltd. All rights reserved.