The atomic displacements on surface generated by low-energy projectile

A simplified analytical model for ion-solid interactions. appropriate for l ow-energy beam depositions, is presented to determine the analytic solution of the deposited energy in the solid. The deposited energy in the surface and the energy deposited in the underlying bulk, correlative to the atomic displacement leaving the lattice damage, are dependent on the mass and inci dent energy of projectiles as well as the sharp displacement threshold ener gy. The determination of deposited energy of ion in subsurface yields a cei ling for the beam energy above which more defects are generated in the bulk resulting in defective films. The accuracy of the angular average over the scattering cross section is evaluated from comparison with experimental re sults. The analytic solution is applied to Ar+ and N+ projectiles in diamon d, graphite and SiC materials, respectively. (C) 2000 Elsevier Science S.A. All rights reserved.