Correlation between texture and average grain size in polycrystalline Ag thin films

The texture and average grain size are investigated in series of silver thi n films deposited at various substrate temperatures and different vacuum co nditions, by introducing the 'structure curve', which describes their corre lation. Its slope gives information on the relative contribution of normal and abnormal grain growth to the structure evolution. In contaminated films normal grain growth is suppressed. The texture sharpness has a maximum bot h in clean and contaminated films above 200 degrees C. This maximum corresp onds to 1 and 0.5 mu m average grain size in clean and contaminated films, respectively. (C) 2000 Elsevier Science S.A. All rights reserved.