K. Kintaka et al., Diffraction gratings of photosensitive ZrO2 gel films fabricated with the two-ultraviolet-beam interference method, APPL OPTICS, 39(4), 2000, pp. 489-493
Photosensitive ZrO2 gel films we:re patterned with a two-beam interference
method by use of a 325-nm-wavelength He-Cd laser for the first time to our
knowledge. The ZrO2 gel films were prepared from Zr(O-n-C4H9)(4) chemically
modified with benzoylacetone. We fabricated uniform gratings with a 0.5-mu
m period on Si or SiO2 substrates by etching the gel films in ethyl alcoho
l after UV irradiation. A maximum diffraction efficiency of 28% was attaine
d with the grating fabricated on Si substrate under a Littrow mounting cond
ition by use of a 633-nm-wavelength He-Ne laser. Blazed gratings could also
be fabricated. (C) 2000 Optical Society of America.