An ion microdosimetry extension to the Monte Carlo High Energy Transport Co
de (HETC) has been developed to allow tracking of all the reaction products
and has been applied to model charge-deposition spectra in pin diodes caus
ed by atmospheric neutron spectra, as well as upsets in DRAMs from ground a
nd space irradiation by protons. These cases cover sensitive zone sizes ran
ging from hundreds of microns to sub-micron. Angular distributions of both
incident particles and reaction products are found to be important, particu
larly for the prediction of multiple-bit upsets in devices of small feature
size.