Images of cleaved GaAs(110) surfaces observed with a reflection optical second harmonic microscope

We have developed a reflection optical second harmonic (SH) microscope as a new surface probe. Using the combination of the developed SH microscope, a near infrared microscope, a confocal laser microscope, a Raman microprobe spectrometer, and an electron probe microanalyzer for x-ray fluorescence, w e have observed microstructures on cleaved GaAs(110) surfaces. We have demo nstrated that slab structures on these surfaces are unambiguously identifie d by the analysis using a combination of these microscopes. We have found t hat the reflection SH microscope is especially sensitive to the slab struct ures. The enhancement of second harmonic generation by the slab structure c ould be well accounted for by an electromagnetic calculation of the SH inte nsity. (C) 2000 American Institute of Physics. [S0021-8979(00)09004-6].