The use of surfactants for control of specific aspects of the VPE growth pr
ocess is beginning to be studied for both the elemental and III/V semicondu
ctors. The objective is to change the characteristics of the material grown
epitaxially by the addition of a surfactant during growth. Most reported s
urfactant effects for semiconductors relate to some detail of the morpholog
y of the growing films. For ordered semiconductor alloys the effects can be
much more dramatic, including major changes in the electrical and optical
properties. Since the bandgap energy is dependent on the microscopic arrang
ement of the atoms in an alloy with a fixed composition, the change in orde
r parameter induced by the surfactant translates into a marked change in th
e bandgap energy. This paper presents the results of a study of the effects
of n-type (Te and Si)? p-type (Zn), and isoelectronic (Sb) dopants on the
ordering process in GaInP grown by OMVPE. All of the dopants studied were f
ound to decrease or eliminate ordering; however? the mechanisms are quite d
ifferent. The donor Te apparently affects the adatom attachment kinetics at
steps on the (001) surface, a surfactant effect. On the other hand the don
or Si was found to decrease the degree of order by an entirely different me
chanism, attributed to an increase in the Ga and In diffusion coefficients
in the bulk. It apparently does not involve the surface. Disordering due to
the acceptor Zn was found ts occur by the same mechanism. The isoelectroni
c impurity Sb is found to act as a surfactant and to decrease the order par
ameter by changing the surface reconstruction. eliminating the [<(1)over ba
r 10>]-P dimers that provide the thermodynamic driving force for formation
of the CuPt structure during growth.