1,1-dimethylhydrazine as a high purity nitrogen source for MOVPE-water reduction and quantification using nuclear magnetic resonance, gas chromatography-atomic emission detection spectroscopy and cryogenic-mass spectroscopy analytical techniques

Hydrazine derivatives are attractive low temperature nitrogen sources for u se in MOVPE due to their low thermal stability. However their purification and subsequent analysis has not previously been investigated in depth for t his application. A detailed study on 1,1-dimethylhydrazine {(CH3)(2)N-NH2} purified by eight different methods and the subsequent quantitative measure ments of water present in the samples obtained is reported here. A correlat ion between H-1 nuclear magnetic resonance spectroscopy (NMR), gas chromato graphy-atomic emission detection (GC-AED) and cryogenic mass spectroscopy ( Cryogenic-MS) has been performed. All three analysis techniques can be used to measure water in the samples and with the best purification the water c ontent can be lowered well below 100 ppm. The high purity of this material has been demonstrated by growth results and the state-of-the-art performanc e of laser diodes.