Citation
C. Tsai et al., Sputtering parameters affecting the corrosion resistance of CoCrPtTa thin film media, J MAGN MAGN, 209(1-3), 2000, pp. 157-159
Citations number
5
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS
ISSN journal
03048853
→ ACNP
Volume
209
Issue
1-3
Year of publication
2000
Pages
157 - 159
Database
ISI
SICI code
0304-8853(200002)209:1-3<157:SPATCR>2.0.ZU;2-B
Abstract
Corrosion resistance of CoCrPtTa thin film media under high temperature and
humidity environment (60 degrees C, 80 RH) was investigated. Effects of sp
uttering parameters, such as film thickness, Ar pressure, substrate bias, p
rotective layer thickness and composition were studied. It is shown that Cr
underlayer thickness and Ar pressure play important roles in the suppressi
on of Co corrosion. (C) 2000 Elsevier Science B.V. All rights reserved.