WAVE-FRONT ANALYSIS WITH HIGH-ACCURACY INVERSION INTERFEROMETER

Citation
B. Spektor et al., WAVE-FRONT ANALYSIS WITH HIGH-ACCURACY INVERSION INTERFEROMETER, Optical engineering, 36(6), 1997, pp. 1754-1759
Citations number
5
Categorie Soggetti
Optics
Journal title
ISSN journal
00913286
Volume
36
Issue
6
Year of publication
1997
Pages
1754 - 1759
Database
ISI
SICI code
0091-3286(1997)36:6<1754:WAWHII>2.0.ZU;2-2
Abstract
A recently introduced wavefront analyzer, based on a Fresnel-lens arra y, is improved by incorporating phase-shifting procedures. The resulti ng compact and stable interferometer can measure wavefront distortions with extremely high accuracy. In our experiments, with no special eff orts at environmental isolation, the instrumental noise level was unde r 0.02 lambda. (C) 1997 Society of Photo-Optical Instrumentation Engin eers.