The development of atom probe field-ion microscopy

Authors
Miller, MK
Citation
Mk. Miller, The development of atom probe field-ion microscopy, MATER CHAR, 44(1-2), 2000, pp. 11-27
Citations number
45
Categorie Soggetti
Material Science & Engineering
Journal title
MATERIALS CHARACTERIZATION
ISSN journal
10445803 → ACNP
Volume
44
Issue
1-2
Year of publication
2000
Pages
11 - 27
Database
ISI
SICI code
1044-5803(200001/02)44:1-2<11:TDOAPF>2.0.ZU;2-G
Abstract
A review of the development of the techniques of atom probe field-ion micro scopy and atom probe tomography is presented. The development is traced fro m the original time-of-flight atom probe field-ion microscope developed by Muller, Panitz, and McLean in 1968 to the energy-compensated three-dimensio nal atom probes that are commercially available today. The various types of atom probes that have been developed are described. Published by Elsevier Science Inc.