Chemical and structural characterization of thin films using electrons andphotons

This tutorial survey describes the application of selected photon- and elec tron-excited characterisation techniques for the analysis of thin films. Th e fundamentals of some techniques are discussed but the focus of this artic le is the link between the different techniques rather than a comprehensive discussion of them. Laboratory-based and synchrotron radiation techniques are compared for the characterization of long- and short-range structural o rder, as well as for chemical and electronic structural analysis. The pract ical application of the analytical procedures discussed is summarized in tw o case studies. Copyright (C) 2000 John Wiley & Sons, Ltd.