Nickel sputtering by high-energy heavy ions

Citation
Ay. Didyk et al., Nickel sputtering by high-energy heavy ions, TECH PHYS L, 26(1), 2000, pp. 46-48
Citations number
8
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
TECHNICAL PHYSICS LETTERS
ISSN journal
10637850 → ACNP
Volume
26
Issue
1
Year of publication
2000
Pages
46 - 48
Database
ISI
SICI code
1063-7850(2000)26:1<46:NSBHHI>2.0.ZU;2-C
Abstract
Recent experimental data on the sputtering of coarse-grained metals by high -energy heavy ions are reviewed. It is pointed out that inelastic energy lo sses of ions have rather insignificant effect on the sputtering yield of me tals. Experimental data on the sputtering of nickel by Kr-86(+) ions are pr esented. The accumulation of radiation defects in the crystal lattice of ni ckel in the course of irradiation leads to an increase in the metal sputter ing yield from the surface of grains, making it comparable with the sputter ing yield from the intergranular region. The results of such experiments ar e important for development of the heavy ion acceleration facilities and fo r the high-energy heavy-ion doping of deep layers in semiconductors. (C) 20 00 MAIK "Nauka/Interperiodica".