Investigation of Au/Au(100) film epitaxial growth by kinetic Monte Carlo simulation

Based on the investigation of molecular dynamics simulation, a deposition d ynamics model of incident atom in vapor phase deposition was established. T he atomistic processes of Au/Au(100) epitaxial growth in the early stage we re simulated by using kinetic Monte Carlo method and adatomic diffusion mod el with local environment. The change of film growth mode with temperature was investigated. We revealed that the monomer diffusion plays a very impor tant role in the film growth. At the temperature as low as that at which th e monomer cannot diffuse in large scale, adatom nucleation and island forma tion depends on the increase of adatom density. With the increase of temper ature, the film growth mode depends on the competition between in-plane dif fusion and inter-layer diffusion of monomers.